ISBN-10 | 0521570808 |
Book Title | Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in |
ISBN | 9780521570800 |
Subject Area | Technology & Engineering |
Publication Name | Sub-Half-Micron Lithography for Ulsis |
Publisher | Cambridge University Press |
Item Length | 10 in |
Subject | Electronics / Circuits / Integrated, Electronics / Optoelectronics, Electronics / Circuits / General, Industrial Technology |
Publication Year | 2000 |
Type | Type |